CVD CMP Pad Conditioner2019-01-15T09:48:54+00:00

Project Description

Semiconductor – Front End Application

CVD CMP Pad Conditioner

· Various patterns can be arranged CVD diamond coated tips
· Apex of the CVD diamond coated tip is flat face
· Allows to engineer the critical pressure applied to each tip for pad conditioning
· EHWA has a patents on the tip size and number for pad conditioning
· The apex where contacts the pad has not changed over the conditioning time
· Pad cut rate is constant